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Path.GetTempFileName Method

Creates a uniquely named, zero-byte temporary file on disk and returns the full path of that file.

Namespace:  System.IO
Assembly:  mscorlib (in mscorlib.dll)
public static string GetTempFileName()

Return Value

Type: System.String
The full path of the temporary file.
Exception Condition
IOException

An I/O error occurs, such as no unique temporary file name is available.

- or -

This method was unable to create a temporary file.

This method creates a temporary file with a .TMP file extension.

The GetTempFileName method will raise an IOException if it is used to create more than 65535 files without deleting previous temporary files.

The GetTempFileName method will raise an IOException if no unique temporary file name is available. To resolve this error, delete all unneeded temporary files.

For a list of common I/O tasks, see Common I/O Tasks.

.NET Framework

Supported in: 4, 3.5, 3.0, 2.0, 1.1, 1.0

.NET Framework Client Profile

Supported in: 4, 3.5 SP1
  • FileIOPermission  

    for writing to the temporary directory. Associated enumeration: FileIOPermissionAccess.Write

Windows 7, Windows Vista SP1 or later, Windows XP SP3, Windows XP SP2 x64 Edition, Windows Server 2008 (Server Core not supported), Windows Server 2008 R2 (Server Core supported with SP1 or later), Windows Server 2003 SP2

The .NET Framework does not support all versions of every platform. For a list of the supported versions, see .NET Framework System Requirements.
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.tmp extension, not .TMP
The remarks say that a ".TMP" extension is created. From my experience, it's actually lower case: ".tmp". This may make a difference if you are doing some case-sensitive string manipulation on the file name.
It also creates actual file.

Although the method name is GetTempFileName, it actually creates 0byte file.

So, you have to use as below.
using (var writeStream = new FileStream(filePath, FileMode.OpenOrCreate,FileAccess.ReadWrite)){ ... }

Do NOT use FileMode.Create.