There is an error here:
SetupPath can contain the backslash ("\") character as well. Useful if you want to point to a sub-directory in your SetupPath, e.g.
<Module Name="MyCustomMasterPage" Url="_catalogs/masterpage" SetupPath="FEATURES\MyMasterPageFeature">
<File Url="CustomMaster.master" Type="GhostableInLibrary" />
</Module>